发明名称 ENHANCEMENT OF PLANAR RF SENSOR TECHNOLOGY
摘要 PROBLEM TO BE SOLVED: To incorporate an RF current sensor into a voltage probe.SOLUTION: An RF sensor system is provided with: a PCB (print circuit board) 12 whose opening 18 is defined by a first outer layer 14a, a second outer layer 14b, a first inner layer, a second inner layer and an inner peripheral part; a first loop having a first plurality of sensor pads 30 which are connected to a first plurality of vias 16 and disposed in the inner peripheral part by a first plurality of traces; a second loop having a second plurality of sensor pads 30 which are connected to a second plurality of vias 22 and disposed in the inner peripheral part by a second plurality of traces; and a core ring 42 incorporated in the first inner layer in the proximity of the first plurality of sensor pads 30, the first plurality of vias 16 and the first plurality of traces. In the RF sensor system, a conductor 20 extends passing through the opening 18, and the first and the second loops generate an electric signal on the basis of the respective sensor pads 30, vias 16, 22, and traces and the core ring 42.
申请公布号 JP2014038097(A) 申请公布日期 2014.02.27
申请号 JP20130167679 申请日期 2013.08.12
申请人 MKS INSTRUMENTS INC 发明人 BROWN DENNIS M;COUMOU DAVID J;BROOKS RAYMOND
分类号 G01R15/18;G01R15/06 主分类号 G01R15/18
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