发明名称 Dynamic Random Access Memory Unit And Method For Fabricating The Same
摘要 A dynamic random access memory unit and a method for fabricating the same are provided. The dynamic random access memory unit comprises: a substrate; an insulating buried layer formed on the substrate; a body region formed on the insulating buried layer and used as a charge storing region; two isolation regions formed on the body region, in which a semiconductor contact region is formed between the isolation regions and is a charge channel; a source, a drain and a channel region formed on the isolation regions and the semiconductor contact region respectively and constituting a transistor operating region which is partially separated from the charge storing region by the isolation regions and connected with the charge storing region via the charge channel; a gate dielectric layer formed on the transistor operating region, a gate formed on the gate dielectric layer; a source metal contact layer, a drain metal contact layer.
申请公布号 US2014054546(A1) 申请公布日期 2014.02.27
申请号 US201213703722 申请日期 2012.10.18
申请人 LIU LIBIN;LIANG RENRONG;WANG JING;XU JUN;TSINGHUA UNIVERSITY 发明人 LIU LIBIN;LIANG RENRONG;WANG JING;XU JUN
分类号 H01L29/775;H01L27/108;H01L29/66;H01L29/78 主分类号 H01L29/775
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