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发明名称
Verfahren und Vorrichtung zum automatischen gegenseitigen Justieren von Halbleiterscheiben gegen Masken
摘要
申请公布号
DE1941934(A1)
申请公布日期
1970.06.18
申请号
DE19691941934
申请日期
1969.08.18
申请人
VEB ELEKTROMAT
发明人
SIEGHARD LANDGRAF,DIPL.-PHYS.
分类号
H01L21/00;H05K13/02
主分类号
H01L21/00
代理机构
代理人
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地址
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