发明名称 LASER PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser processing device which inhibits debris occurring during laser processing from adhering to a suction passage of dust collection means.SOLUTION: A laser processing device includes a processing head 36 which radiates a laser beam to a workpiece. The processing head includes dust collection means 70 which is disposed between a condensing lens 39 and the workpiece and collects debris occurring when the laser beam condensed by the condensing lens is radiated to the workpiece. The dust collection means 70 includes a suction passage 78 where one end is connection with a suction source and the other end opens on an upper surface of the workpiece. The laser processing device further includes cleaning fluid supply means 82 which supplies a cleaning fluid to the suction passage.
申请公布号 JP2014036987(A) 申请公布日期 2014.02.27
申请号 JP20120180761 申请日期 2012.08.17
申请人 DISCO ABRASIVE SYST LTD 发明人 MICHAEL WILLIAM GADD
分类号 B23K26/16;B23K26/36;B23K26/60;B23K26/70;H01L21/301 主分类号 B23K26/16
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