发明名称 METHOD FOR FABRICATING NANOGAP ELECTRODES, NANOGAP ELECTRODES ARRAY, AND NANODEVICE WITH THE SAME
摘要 A substrate 1 having metal layers 2A and 2B arranged to form a gap is dipped in an electroless plating solution mixed an electrolyte solution including metal ions with a reducing agent and a surfactant. Metal ions are reduced by the reducing agent to be precipitated on the metal layers 2A and 2B, and the surfactant is adhered to a surface of the metal on the metal layers, thereby forming a pair of electrodes 4A, 4B to be controlled to have a nanometer sized gap. These steps enable to provide a method for fabricating nanogap electrodes, a nanogap electrodes array, and a nanodevice with the same.
申请公布号 US2014054788(A1) 申请公布日期 2014.02.27
申请号 US201214003679 申请日期 2012.02.28
申请人 MAJIMA YUTAKA;TERANISHI TOSHIHARU;MURAKI TARO;TANAKA DAISUKE;JAPAN SCIENCE AND TECHNOLOGY AGENCY 发明人 MAJIMA YUTAKA;TERANISHI TOSHIHARU;MURAKI TARO;TANAKA DAISUKE
分类号 H01L29/41;H01L21/288 主分类号 H01L29/41
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