CHARGED PARTICLE BEAM DEVICE AND SAMPLE OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device which allows the user to observe a sample in an ambient air atmosphere or a gas atmosphere, as well as observe the inside of the sample, without significantly changing the conventional configuration of a high vacuum type charged particle microscope.SOLUTION: The present invention is a sample observation method for observing a sample by irradiating a sample 6 with a primary charged particle beam and detecting a secondary charged particle signal obtained by irradiation. In the sample observation method, a primary charged particle beam generated in a charged particle optical lens barrel 2 maintained in a vacuum state is transmitted or passed through a diaphragm disposed in such a way as to separate between a space where a sample is placed and the charged particle optical lens barrel and a transmitted charged particle beam obtained by irradiating the sample placed in a prescribed gas atmosphere under atmospheric pressure or a state slightly negative to atmospheric pressure with the primary charged particle beam is detected.