| 摘要 |
<p>The purpose of the present invention is to extend the lifetime of a scribing wheel and to strengthen the strength of a cross section of a substrate when dividing the substrate which is a brittle material. A diamond film is formed on the lateral surface of a scribing wheel base material in which the central portion of the surface around a disc has maximum size with a CVD method. The central portion of the lateral surface is ground, and a surface including a circle composed of ridges is perpendicular to a central axis of the scribing wheel. Therefore, the roughness of the ridge portion can be decreased. The evenness of the cross section of the divided base material can be increased when the substrate, which is a brittle material, is scribed and divided by utilizing the scribing wheel so that the strength of the cross section of the substrate can be increased. Furthermore, the abrasion of the ridge portion is little even though the scribing process is performed so that the lifetime of the scribing wheel is extended.</p> |
