| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump that can prevent fastening members for fixing the turbo molecular pump to an external device from being damaged by a shearing force resulting from the deformation of a flange of a pump container caused by an impact torque in the case of damage to rotor blades, without upsizing the pump container.SOLUTION: An inlet 15 and an upper flange 21 are formed at an upper part of a casing member 12 in which an exhaust function part made up of rotor blades 6 and stator blades 7 is housed. A turbo molecular pump 1 is attached to the external device with fastening members 92 inserted into a plurality of through-holes 22 provided in the upper flange 21. A ring-shaped reinforcing member 50 configured by connecting a pair of split rings 51 is attached to the perimeter of the upper flange 21, thereby preventing the upper flange 21 from being deformed. |
