| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying device for a glass substrate having an excellent liquid draining properties of a cleaning liquid on the glass substrate.SOLUTION: In a drying method for conveying a substrate 2 after cleaning while tilting the substrate, moving a gas spray means 30 for spraying the gas 9 to the substrate 2 with the substrate 2, and for spraying the gas 9 to the substrate 2, an injection amount of the gas 9 is controlled by spraying the gas 9 intermittently and/or increasing/decreasing the gas 9. |
