| 摘要 |
A vertical heat treatment apparatus including a furnace body having heater elements, and a treatment container, disposed in the furnace body, for housing and heat treating objects W to be treated. An air supply line and an air exhaust line are connected to the furnace body. An air supply blower and an air supply line valve mechanism are disposed in the air supply line, and an air exhaust blower and an air exhaust line valve mechanism are disposed in the air exhaust line. A protective tube is provided which penetrates through the furnace body and in which a temperature sensor signal line is housed, and a pressure detection hole is formed in the protective tube. A pressure detection sensor is connected to the pressure detection hole. |
