TRENCH DEVICES HAVING IMPROVED BREAKDOWN VOLTAGES AND METHOD FOR MANUFACTURING SAME

摘要

In one embodiment, the present invention includes a semiconductor power device. The semiconductor power device comprises a trenched gate and a trenched field region. The trenched gate is disposed vertically within a trench in a semiconductor substrate. The trenched field, region is disposed vertically within the trench and below the trenched gate. A lower portion of the trenched field region tapers to dispose an electric field.