| 摘要 |
PROBLEM TO BE SOLVED: To improve processing accuracy of a plate-like workpiece while recognizing a sink amount of a holding table caused by grinding load.SOLUTION: Control means 42 included in a grinder includes: a first storage section 421 which stores a value of a gauge 41 which measures a height of the top surface of a holding table 10 when the holding table 10 does not receive grinding load; a second storage section 422 which stores a value of the gauge 41 when the holding table 10 receives grinding load from grinding transport means 30; a specifying section 423 which specifies a variation amount of the height of the holding table 10 between the case when the table does not receive grinding load and the case when the table receives grinding load. By controlling the grinding transport means 30 so as to bring a variation amount of height position when the holding table 10 sunk during grinding of a plate-like workpiece W to an allowable value of a previously specified variation amount, a thickness of the plate-like workpiece W can be ground highly accurately into a predetermined thickness. |
