发明名称 |
SEMICONDUCTOR STRUCTURES PROVIDED WITHIN A CAVITY AND RELATED DESIGN STRUCTURES |
摘要 |
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming at least one Micro-Electro-Mechanical System (MEMS) cavity. The method for forming the cavity further includes forming at least one first vent hole of a first dimension which is sized to avoid or minimize material deposition on a beam structure during sealing processes. The method for forming the cavity further includes forming at least one second vent hole of a second dimension, larger than the first dimension. |
申请公布号 |
US2014054728(A1) |
申请公布日期 |
2014.02.27 |
申请号 |
US201213591771 |
申请日期 |
2012.08.22 |
申请人 |
MALING JEFFREY C.;STAMPER ANTHONY K.;DEREUS DANA R.;MORRIS, III ARTHUR S.;WISPRY, INC.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
MALING JEFFREY C.;STAMPER ANTHONY K.;DEREUS DANA R.;MORRIS, III ARTHUR S. |
分类号 |
H01L29/84;G06F17/50;H01L21/02 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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