发明名称 ISOLATION STRUCTURES FOR FINFET SEMICONDUCTOR DEVICES
摘要 One illustrative device disclosed herein includes a plurality of fins separated by a trench formed in a semiconducting substrate, a first layer of insulating material positioned in the trench, the first layer of insulating material having an upper surface that is below an upper surface of the substrate, an isolation layer positioned within the trench above the first layer of insulating material, the isolation layer having an upper surface that is below the upper surface of the substrate, a second layer of insulating material positioned within the trench above the isolation layer, the second layer of insulating material having an upper surface that is below the upper surface of the substrate, and a gate structure positioned above the second layer of insulating material.
申请公布号 US2014054723(A1) 申请公布日期 2014.02.27
申请号 US201314065928 申请日期 2013.10.29
申请人 GLOBALFOUNDRIES INC. 发明人 XIE RUILONG
分类号 H01L27/088;H01L29/06 主分类号 H01L27/088
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