发明名称 METHOD AND DEVICE FOR LIGHT-INDUCED OR LIGHT-SUPPORTED DEPOSITING OF METAL ON A SURFACE OF A SEMICONDUCTOR COMPONENT
摘要 The invention relates to a method for light entrapment in coating baths, in order thereby to deposit metal on a surface of a semiconductor component in a light-induced or light-supported manner. The method comprises at least the following steps: A) providing the coating bath which contains a matrix and a radiation deflecting component or is made of same; B) introducing the at least one semiconductor component into the coating bath; C) carrying out the light-induced or light-supported deposition.
申请公布号 WO2014029667(A2) 申请公布日期 2014.02.27
申请号 WO2013EP66920 申请日期 2013.08.13
申请人 FRAUNHOFER-GESELLSCH. Z. FOERDERUNG D. ANGEW. FORSCHUNG E.V. 发明人 ZIMMER, MARTIN;RENTSCH, JOCHEN;SAVIO, CHRISTIAN;KOENIG, CLEMENS
分类号 C23C18/16 主分类号 C23C18/16
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