METHOD AND DEVICE FOR LIGHT-INDUCED OR LIGHT-SUPPORTED DEPOSITING OF METAL ON A SURFACE OF A SEMICONDUCTOR COMPONENT
摘要
The invention relates to a method for light entrapment in coating baths, in order thereby to deposit metal on a surface of a semiconductor component in a light-induced or light-supported manner. The method comprises at least the following steps: A) providing the coating bath which contains a matrix and a radiation deflecting component or is made of same; B) introducing the at least one semiconductor component into the coating bath; C) carrying out the light-induced or light-supported deposition.
申请公布号
WO2014029667(A2)
申请公布日期
2014.02.27
申请号
WO2013EP66920
申请日期
2013.08.13
申请人
FRAUNHOFER-GESELLSCH. Z. FOERDERUNG D. ANGEW. FORSCHUNG E.V.
发明人
ZIMMER, MARTIN;RENTSCH, JOCHEN;SAVIO, CHRISTIAN;KOENIG, CLEMENS