SURFACE SHAPE MEASURING EQUIPMENT

摘要

The present invention relates to a surface shape measuring device capable of rapidly and accurately measuring the 3-dimensional shape of an object in the measuring device using an interferometer. The present invention includes the interferometer comprising: a lighting part for generating measuring light; a light control part for controlling the operation of the lighting part; a beam splitter for splitting the light outputted from the lighting part so that a reference surface of a reference mirror and a measured surface of the object are respectively radiated with the light; and a camera for taking a picture of interference fringes formed by the interference of the reference light and the measured light reflected from the measured surface and the reference surface; wherein the light control part controls the brightness of the lighting part in real time so as to radiate the measuring light with complementary brightness depending on the reflectivity of the measured surface.