| 发明名称 |
Angular velocity sensor |
| 摘要 |
The tuning fork is arranged on a silicon substrate such that the side surface of fork is orthogonal to the driving direction of a fork arm and faces the surface bearing of substrate. The elastic modulus of the fork varies irrespective of surface bearing of substrate. |
| 申请公布号 |
EP2386826(B1) |
申请公布日期 |
2014.02.26 |
| 申请号 |
EP20110177382 |
申请日期 |
2003.06.05 |
| 申请人 |
PANASONIC CORPORATION |
发明人 |
HAYASHI, MICHIHIKO;TAJIKA, HIROFUMI;NAKATANI, MASAYA |
| 分类号 |
G01C19/5628;G01C19/56;G01C19/5621;G01C19/5663;H01L41/22;H01L41/319 |
主分类号 |
G01C19/5628 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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