| 摘要 |
PURPOSE: An MEMS switch is provided to prevent degradation of a contact force due to large resistance when a switch contact part is contacted in a signal line. CONSTITUTION: An MEMS switch includes a first substrate(100), a first signal line(125), a piezoelectric capacitor(115,135), a second signal line(220), and a second substrate. A first cantilever, a second cantilever, and third cantilever(110,120,130) are formed on the first substrate. The first signal line is formed in a top part of the second cantilever. The piezoelectric capacitor is formed in a top part of the first cantilever and the third cantilever. The second signal line is positioned in a top part of the first signal line. The second signal line is formed on the second substrate. |
