CLEANING APPARATUS AND METHOD FOR EVAPORATION MASK OF ORGANIC LIGHT EMITTING DIODES

摘要

The present invention relates to a device and a method for cleaning an organic light emitting diodes (OLED) deposition mask. The method comprises a S1 step that a dry-cleaning part receives a mask separated from a substrate through a robot arm from a rod lock chamber for receiving the mask in which deposition materials including an organic compound and an inorganic compound are deposited in an inline deposition device for a deposition process of an OLED, a S2 step that the dry-cleaning part dry-cleans the organic compound of the mask of the S1 step, a S3 step that a wet-cleaning part receives the mask treated in the S2 step from the robot arm and wet-cleans a residue in the mask, and a S4 step that the robot arm transfers the mask treated in the S3 step to the rod lock chamber and that the transferred mask is transferred from the rod lock chamber to the line deposition device. [Reference numerals] (S1) Step that a dry-cleaning part receives a mask separated from a substrate; (S2) Step that the dry-cleaning part performs dry-cleaning; (S3) Step that a wet-cleaning part wet-cleans a remaining inorganic substance in the mask; (S4) Step that the mask treated in the S3 step is transferred to the rod lock chamber and that the transferred mask is transferred from the rod lock chamber to the line deposition device; (S4-1) Step that the mask treated in the S3 step is transferred to a buffer part to be stored and that the stored mask is transferred to the rod lock chamber