SEMICONDUCTOR TEST DEVICE, SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE

摘要

The present invention relates to a semiconductor test device, a semiconductor device and a method for testing a semiconductor device, capable of testing normal connection between a substrate including a through electrode and a metal line on the upper part of the same, and insulation between the through electrode and the substrate etc. A semiconductor test device according to the present invention includes a switch for connecting an oscillator including a control port and the through electrode or the control port and a metal line layer connected to the through electrode selectively.