| 摘要 |
Disclosed is a present invention relating to a method for fabricating a nano/micro composite solar cell and a solar cell thereof by manufacturing the nano/micro composite solar cell by a POCL3 doping so as to secure uniformity in order to increase high efficiency of the solar cell. An embodiment of the present invention presents the method for fabricating the nano/micro composite solar cell which comprises a step of preparation stage of a first conductive substrate, a step of forming a micro wire by patterning a photoresist onto the first conductive substrate, a step of forming a nano wire to the areas where the micro wire has not been formed yet, a step of doping a POCL3to the first conductive substrate, the micro wire and the nano wire so as to form an upper part of a second conductive substrate, a lower part of an emitter layer and a PSG, a step of removing the PSG in order to expose the upper and lower parts of the emitter layer, a step of etching the emitter layer by removing the lower part of the emitter layer so that the first conductive layer as well as the upper part of the emitter layer can be exposed, and a step of forming an electrode to the exposed first conductive substrate and the upper part of the emitter layer. [Reference numerals] (S1) Preparing a first conductive substrate; (S2) Forming a photoresist; (S3) Forming a micro wire; (S4) Depositing AgNO_3; (S5) Forming a nano wire; (S6) Doping POCI_3; (S7) Removing PSG; (S8) Etching an emitter layer; (S9) Forming an electrode |
