MoSi2-based coil heater and tubular heater module having the same

摘要

The invention is directed to an MoSi 2 -based coil heater including a coil having an inner diameter (D) not smaller than 300 mm, in which the inner diameter (D) of the coil and an interheater distance (t) satisfy the following condition: 0.9 ‰¤ t / D / 2 1 / 2 ‰¤ 4.0.