| 摘要 |
<p>A photoelectric encoder which can be miniaturized is provided. A photoelectric encoder 10 includes: a light source 11; a scale 12; a mixing portion (polarization beam splitter) 13 which mixes a plurality of diffracted light beams A1, A2 reflected from the scale 12; a non-polarization beam splitter 143 which splits the diffracted light beam mixed by the mixing portion 13, into a plurality of light beams; a plurality of detectors 15A, 15B; and a quarter wave plate 151 which is placed in one of the detectors 15A, 15B. The photoelectric encoder further includes a mirror 142 which is placed on an optical path between the mixing portion 13 and the non-polarization beam splitter 143, and which reflects the diffracted light beam from the mixing portion 13. The mirror 142 reflects the diffracted light beam in a direction which is parallel to the plane of the scale 12, or in a direction which is directed to the plane of the scale 12.</p> |
