发明名称 Laser-induced backside annealing using fluid absorber
摘要 A coating material containing metal oxide is applied to one side of a substrate, both coating and substrate being transparent to visible light. An absorber material is placed in heat transfer proximity to the coating and a laser beam is transmitted through the substrate and through the coating to strike the absorber material at the interface between coating and absorber. The absorber material absorbs optical energy from the laser beam causing the material to heat. Heat from the absorber propagates to the coating to heat a localized region, causing the coating material to anneal. If desired, the coating material can include a doping material that fuses into the coating during annealing.
申请公布号 US8658260(B2) 申请公布日期 2014.02.25
申请号 US201213453518 申请日期 2012.04.23
申请人 ZHANG JIE;PANASONIC CORPORATION 发明人 ZHANG JIE
分类号 B05D3/02;B05D3/00 主分类号 B05D3/02
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