发明名称 MINIATURIZED INTEGRATED MICRO ELECTO-MECHANICAL SYSTEMS (MEMS) OPTICAL SENSOR ARRAY
摘要 <p>This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.</p>
申请公布号 KR20140022768(A) 申请公布日期 2014.02.25
申请号 KR20137012998 申请日期 2011.09.13
申请人 KOC UNIVERSITESI 发明人 UREY HAKAN;ALACA BURHANETTIN ERDEM;TIMURDOGAN ERMAN
分类号 G01N29/02;B81B7/02 主分类号 G01N29/02
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