| 摘要 |
A gas supply passage is connected to a decontamination liquid supply passage at a tail end portion side from a delivery device, and an on-off valve which opens and closes the gas supply passage is provided. A controller stores a housed weight of the decontamination liquid between a connection point at which the above described gas supply passage is connected to the decontamination liquid supply passage and the above described tail end portion. When a weight of the decontamination liquid is reduced by a total value of a predetermined weight W which should be supplied to the downstream side equipment and the above described housed weight as a result of starting supply of the decontamination liquid to the above described downstream side equipment, the controller opens the above described on-off valve to return the decontamination liquid at the upstream side from the connection point. |
