发明名称 |
Method and system for controlling radio frequency power |
摘要 |
A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse. |
申请公布号 |
US8659335(B2) |
申请公布日期 |
2014.02.25 |
申请号 |
US20090491538 |
申请日期 |
2009.06.25 |
申请人 |
NAGARKATTI SIDDHARTH;TIAN FENG;LAM DAVID;RASHID ABDUL;BENZERROUK SOUHEIL;BYSTRYAK ILYA;MENZER DAVID;SCHUSS JACK J.;AMBROSINA JESSE E.;MKS INSTRUMENTS, INC. |
发明人 |
NAGARKATTI SIDDHARTH;TIAN FENG;LAM DAVID;RASHID ABDUL;BENZERROUK SOUHEIL;BYSTRYAK ILYA;MENZER DAVID;SCHUSS JACK J.;AMBROSINA JESSE E. |
分类号 |
H03K3/00 |
主分类号 |
H03K3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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