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发明名称
摘要
申请公布号
NO120815(B)
申请公布日期
1970.12.07
申请号
NO19680004448
申请日期
1968.11.08
申请人
EURATOM
发明人
BLOCK M;WURM J;BEUCHERIE P
分类号
C23C14/34;C23C14/32;C23C14/40;H01J37/34;H01L21/302;H01L21/3065
主分类号
C23C14/34
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