发明名称 HEATING ASSEMBLY FOR VACUUM DEPOSITION AND VACUUM DEPOSITION APPARATUS HAVING THE SAME
摘要 Disclosed is a heating assembly for vacuum deposition, wherein the heating assembly heats a carrier on which a deposition material is deposited. The heating assembly is formed by spirally bending or winding a line-shaped or a plate-shaped heating element at least once to have one side open so that the carrier is inserted and mounted. The heating assembly for vacuum deposition stably mounts the carrier on which a deposition material is deposited and makes the deposition material to be evenly and efficiently deposited with a small amount of the carrier by evaporating the deposition material in the particular direction in the vacuum deposition apparatus.
申请公布号 KR101366104(B1) 申请公布日期 2014.02.25
申请号 KR20120067415 申请日期 2012.06.22
申请人 发明人
分类号 C23C14/26 主分类号 C23C14/26
代理机构 代理人
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