| 摘要 |
PURPOSE: A cell counting chip is provided to detect and count various kinds of cells with more minute sensitivity by diversifying the width of an active region. CONSTITUTION: A cell counting chip comprises a substrate, a doped channel layer, a source and a drain region, a gate insulating layer, a field silicon dioxide film, a spacer, and several cells. A field oxide film defines active region by being formed on both sides of a substrate. A spacer is formed on the oxide film of field and defines a sample liquid injection space. A cell comprises a gate electrode which applies voltage to the sample liquid injected through sample liquid injection space. Several cells is formed in an array shape. The width of active area of each sell is different from each other. |
