Lid opening/closing system for closed container

摘要

The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.