| 摘要 |
The present invention is for solving problems caused by enlarging a large amount of high temperature evaporation sources. According to the present invention, an object fusion unit and an evaporation unit are formed by using a separate melting pot and a separate heater in one chamber so that the inconvenience according to the large capacity is reduced. An object supply unit is formed in a separate chamber. One or more objects can be supplied to the object supply unit to simultaneously metallize multi-components thin films. |
