发明名称 TEMPERATURE DETECTOR
摘要 A temperature detector includes germanium film sensitive to temperature, doped with admixtures of gallium and arsenium. The film is arranged on the support made of semi-insulating gallium arsenide, those are placed in the body. The film is made of elastically deformed germanium, film thickness d is determined from the condition 50 nm ≤d≤dnm, wherein dis critical thickness of film at which the relaxation of elastic tensions takes place.
申请公布号 UA87874(U) 申请公布日期 2014.02.25
申请号 UA20130009808U 申请日期 2013.08.06
申请人 V. LASHKARIOV PHYSICS INSTITUTE OF SEMICONDUCTORSOF THE NATIONAL ACADEMY OF SCIENCE OF UKRAINE 发明人 SHVARTS YURIY MYKHAILOVYCH;SHVARTS MARYNA MYKHAILIVNA
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