摘要 |
A temperature detector includes germanium film sensitive to temperature, doped with admixtures of gallium and arsenium. The film is arranged on the support made of semi-insulating gallium arsenide, those are placed in the body. The film is made of elastically deformed germanium, film thickness d is determined from the condition 50 nm ≤d≤dnm, wherein dis critical thickness of film at which the relaxation of elastic tensions takes place. |