NITRIDING PRODUCT AND METHOD FOR NITRIDING BY PLASMA

摘要

The present invention relates to a nitrified product and a nitriding method by using plasma for replacing a nitiridation process of a bushing product with a nitridation process and a sulphurizing nitridation process processed in a clean plasma environment comprising: a pre-heating step for heating a specimen by charging the specimen to an inside of a furnace, and raising the temperature inside a furnace to a pre-heating process temperature in a vacuum atmosphere; a sputtering step for maintaining the pressure inside the furnace to a sputtering process pressure, and for ion etching a surface of the specimen while inserting Ar and H2 into an inside of the furnace; a soft nitriding step for maintaining pressure inside the furnace to a soft nitriding process pressure, and for inserting N2, H2, and carbon gas, and for forming a compound layer and a hardened layer on a surface of the specimen while applying a current to a screen net equipped in the specimen and an outside of the specimen; a sulfnitriding step for forming a sulfnitriding layer above a compound layer by inserting H2S after lowering the temperature inside a furnace to a sulfnitriding process temperature; and a cooling step for cooling the specimen by inserting N2 into an inside of a furnace. According to the configuration, a process can be simplified; work expenses can be saved through an environment-friendly process; whole product manufacturing costs can be reduced by replacing an expensive MoS2 process; and a problem of a post-process which is processed after salt bath nitriding can be solved by minimizing deformation after a plasma process. [Reference numerals] (AA) Sulfnitriding layer; (BB) Compound layer; (CC) Hardened layer; (DD) Specimen