发明名称 ANGULAR VELOCITY SENSOR
摘要 <p>The present invention relates to an angular velocity sensor. The angular velocity sensor (100) according to the present invention includes: a first mass (110a) and a second mass (110b); a first frame (120) which is placed outside the first and the second mass; a first flexible unit (130) which connects the first and the second mass and the first frame in the Y-axis direction; a second flexible unit (140) which connects the first and the second mass and the first frame in the X-axis direction; a second frame (150) which is placed outside the first frame; a third flexible unit (160) which connects the first frame and the second frame in the X-axis direction; and a fourth flexible unit (170) which connects the first frame and the second frame in the Y-axis direction. The first frame has a smaller Z-axis width than the second frame.</p>
申请公布号 KR101366990(B1) 申请公布日期 2014.02.24
申请号 KR20120157160 申请日期 2012.12.28
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 KIM, JONG WOON;LIM, JUN;LEE, JAE CHANG
分类号 G01P3/44 主分类号 G01P3/44
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