| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost and simple multi-chip optical device composed of dissimilar materials that suppresses a phase error due to a gap and suppresses an influence of reflection return light, and to provide a packaging method of the optical device.SOLUTION: A Mach-Zehnder multi-chip module is an optical switch constituted of three chips comprising: a silicon optical circuit 101 including phase shifters 103 each provided to two waveguides; a quartz-based PLC 102a including a first directional coupler 106a connected with both ends of the phase shifters; and a quartz-based PLC 102b including a second directional coupler 106b. Respective waveguides close to input-output ports of the silicon optical circuit 101 and the quartz-based PLCs 102a and 102b are formed perpendicularly to a substrate end face, and emit propagation light perpendicularly to the substrate end face. Furthermore, the silicon optical circuit 101 and the quartz-based PLCs 102a and 102b are bonded by an adhesive 107 having refractive index equivalent to that of quartz so that gaps 108a to 108d are equal to each other. |
