METHOD FOR MANUFACTURING ZnMgOS-BASED FILM AND METHOD FOR COATING WITH ZnMgOS-BASED FILM, AND METHOD FOR MANUFACTURING ZnMgOS-BASED FILM CONTAINING BODY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a ZnMgOS-based film capable of manufacturing a ZnMgOS-based film having light transmissivity better than that of a film manufactured according to a conventional liquid-phase composition method and a method for coating with a ZnMgOS-based film, and a method for manufacturing a ZnMgOS-based film containing body.SOLUTION: There is provided with a method for manufacturing a ZnMgOS-based film in which the ZnMgOS-based film is manufactured on a heated substrate by using a solution containing carboxylic acid of which the concentration is 15% or more and a raw material solution having a zinc source contained in the solution. In the case where a base material is constituted of a material which is easy to corrode with carboxylic acid, there is provided a method for coating with a ZnMgOS-based film in which, after the base material is coated with the ZnMgOS-based film by using the raw material solution in which the concentration of carboxylic acid is reduced and/or after the base material of which the heating temperature is decreased is coated with the ZnMgOS-based film, the coated base material is coated with the ZnMgOS-based film according to the manufacturing method. There is also provided a method for manufacturing a ZnMgOS-based film containing body which includes the step of coating with the ZnMgOS-based film using the coating method.