| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive film that has a smaller variation in the surface resistance value in the width direction and improved film characteristics.SOLUTION: A conductive film 1 includes an elongated film base 2, an indium based oxide layer 3, a metal layer 4, and an oxidized metal layer 5 in this order. The elongated film base 2 has a longitudinal direction and a width direction orthogonal to the longitudinal direction, and the width direction dimension of the elongated film is greater than or equal 1 m. The oxidized metal layer 5 is a layer having a thickness of 1 nm to 15 nm formed by sputter deposition. |
