| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal microscope capable of flexibly changing the measurement accuracy and the measurement speed.SOLUTION: The confocal microscope includes: a light source 101: a DMD 103 which reflects light from the light source 101 on an optical path toward an object W to be measured only in a pre-selected partial region; a DMD control part 104 which controls the DMD 103; an objective lens 108 which transmits light reflected to the optical path by the DMD 103 and return light reflected by the object W to be measured; a triaxial driving device 112 which changes the relative distance between the object W to be measured and the objective lens 108 to determine positions to be irradiated with light on the object W to be measured; a photodetector 110 for photographing an image on the basis of the return light from the object W to be measured for each of the determined positions to be irradiated; and a calculation part 111 which generates three-dimensional shape data of the object W to be measured on the basis of the plurality of photographed images. The DMD control part 104 controls the DMD 103 to sequentially changes the partial region. |
