SHAPE MEASUREMENT DEVICE, STRUCTURE MANUFACTURING SYSTEM, SHAPE MEASUREMENT METHOD, STRUCTURE MANUFACTURING METHOD, AND SHAPE MEASUREMENT PROGRAM

摘要

PROBLEM TO BE SOLVED: To achieve reduction in the extent to which a measurement time for measuring three-dimensional shape becomes long.SOLUTION: A shape measurement device includes: an imaging unit which generates a picked-up image obtained by imaging a measurement object; an irradiation unit which irradiates the measurement object from a projection direction being different from a direction in which the imaging unit picks up an image, with illumination light beams having different intensity distribution so that light beams having different light intensities are irradiated depending on positions of the measurement object so that the picked up image generated by the imaging unit is picked up as an image with a pattern projected on the measurement object; a reference light generating unit which generates reference light that irradiates the measurement object; and a detection unit which detects, when the reference light is projected on the measurement object and based on a picked-up image including the picked-up image picked up by the imaging unit, a target range for shape measurement of the measurement object that is found from the picked-up image obtained by the imaging unit by irradiation of the illumination light from the illumination unit.