| 摘要 |
PROBLEM TO BE SOLVED: To prevent foreign objects from contaminating a substrate when pre-wet treatment of the substrate is performed by a pre-wet thinner nozzle.SOLUTION: A coating applicator according to one embodiment applies a chemical solution to a substrate and includes: a chemical solution nozzle which discharges the chemical solution onto the substrate; and a solvent nozzle which discharges a solvent onto the substrate. The coating applicator further includes: a solvent bath in which the solvent is housed and a tip of the chemical solution nozzle is held in solvent vapor when the chemical solution nozzle is in the stand-by state; and a dummy dispensation port used for discarding the chemical solution during dummy dispensation of the chemical nozzle, the dummy dispensation port in which the solvent nozzle is housed when the solvent nozzle is in the stand-by state. Furthermore, the coating applicator includes an ionizer which ionizes the atmosphere around the dummy dispensation port. |
