INFORMATION PROCESSING METHOD, INFORMATION PROCESSOR, PROGRAM, IMAGING APPARATUS, INSPECTION METHOD, INSPECTION DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an information processing method which is capable of acquiring a color image of a subject with a high image quality at a low cost.SOLUTION: The information processing method comprises the step of acquiring a plurality of first color component images being color component images of a plurality of color components in a first region of a subject, which are imaged by an imaging apparatus which includes an optical element capable of selecting light of the plurality of components from light of the subject and is capable of photographing, per color component, color component images being images represented by the selected color component light, and a plurality of second color component images being color component images of the color components in a second region adjacent to the first region. The plurality of first color component images are corrected with respect to each color component, and the plurality of second color component images are corrected with respect to each color component. The plurality of first corrected color component images and the plurality of second corrected color component images are combined to generate a color composite image which has the plurality of color components in the entire region including the first and second regions.