| 摘要 |
PROBLEM TO BE SOLVED: To more accurately measure an amount of infrared absorption in an infrared sensor for measuring a density or the like of a target detection object.SOLUTION: An infrared sensor includes, as unit sensing parts (U1 and U2), spectrometers (FP1 and FP2) for spectrally dispersing incident light, and thermal type infrared detectors (IR1 and IR2) for receiving light spectrally dispersed by the spectrometers. The infrared sensor includes a plurality of unit sensing parts, and all the unit sensing parts are formed on one first substrate (13). The unit sensing parts include at least one reference measurement part (U1) in which a spectral wavelength λof the spectrometer (FP1) is fixed or varied and is set so that light at this spectral wavelength is not absorbed by a target detection object, and a main measurement part (U2) in which a spectral wavelength λof the spectrometer (FP2) is varied and is set so that light at this spectral wavelength is absorbed by the target detection object. |
