| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for controlling an electrostatic actuator, capable of reducing electrostatic charge hindering moving operation of a mover without increasing a size of a device.SOLUTION: A method for controlling an electrostatic actuator is disclosed. An electrostatic actuator 100 to which this method is applicable comprises a stator 1 and a mover 2, a plurality of electrodes 3 for making the mover move being provided in the stator. In the method, when making the mover move, for example, movement signals respectively with mutually different four phases are supplied to the plurality of electrodes, and when the movement signals are not supplied, an AC static charge elimination signal of which a voltage changes to be alternately negative and positive with the same waveform and which reduces the charge amount of electrostatic charge generated in the stator and the mover, is supplied to each of the plurality of electrodes, thus reducing the electrostatic charge, and a signal having decreasing positive and negative voltage times where a positive voltage time and a negative voltage time decrease together due to gradual increase of frequency, attenuation of pulse, or the like, or a signal of which a voltage is attenuated, is used as the static charge elimination signal. |
