| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator capable of preventing failures even when electrode parts are disposed in high density.SOLUTION: Both ends of each second beam member 32 are fixed by a first beam member 31 and a third beam member 33. This structure improves the rigidity of the second beam members 32 and thus reduces displacement of the second beam members 32 even when disturbance and manufacturing errors occur. Further, the structure prevents failures even if the second beam members 32 and fixed electrodes 2 are disposed in high density. |
