ION SOURCE AND MASS SPECTROMETER HAVING THE SAME

摘要

According to one embodiment of the present invention, an ion source includes an anode tube where a gas supplied through one side is ionized and discharged to the other side, and having a slit in an outer circumference, a filament discharging thermoelectrons to the slit by ionizing the gas, at least one hole through which the thermoelectrons passes and reduces the diffusion of the thermoelectrons supplied into the anode tube, and a diffusion barrier arranged between the slit and the filament.