发明名称 Patterning method of grapheme film
摘要 The present invention relates to a patterning method of a graphene film, and the method comprises the following steps for instance: binding a first substrate which is coated with graphene with a second substrate with a patterned adhesive layer by locating the graphene and the patterned adhesive layer on the first and second substrates to face each other; and separating the first and second substrates. The first and second substrates are processed with plasma for offering high adhesive force to improve the quality of a pattern. A patterning method of graphene is capable of obtaining a substrate in which two graphene are coated through one cycle of a graphene patterning process, and needs no additional etching process or post-treatment process for reducing the processing time and costs.
申请公布号 KR101364593(B1) 申请公布日期 2014.02.21
申请号 KR20120050778 申请日期 2012.05.14
申请人 发明人
分类号 C01B31/02;C23C16/00;H01L21/027 主分类号 C01B31/02
代理机构 代理人
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