| 发明名称 |
METALLISATION BARRIER BASED ON ALUMINIUM OXIDE |
| 摘要 |
The present invention relates to aluminium oxide-based passivation layers which simultaneously act as diffusion barrier for underlying wafer layers against aluminium and other metals. Furthermore, a process and suitable compositions for the production of these layers are described. |
| 申请公布号 |
KR20140022012(A) |
申请公布日期 |
2014.02.21 |
| 申请号 |
KR20137026493 |
申请日期 |
2012.02.09 |
| 申请人 |
MERCK PATENT GMBH |
发明人 |
KOEHLER INGO;DOLL OLIVER;STOCKUM WERNER;BARTH SEBASTIAN |
| 分类号 |
H01L31/18;C23C18/12;C23C24/08;C23C26/00 |
主分类号 |
H01L31/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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