发明名称 SPUTTERING TARGET AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE INCLUDING BLACK MATRIX DEPOSITED THEREBY
摘要 A sputtering target that can form a black matrix having high-resistance and low-reflection characteristics and an organic light-emitting display device including the black matrix deposited thereby. The sputtering target that is used in a sputtering process for depositing a black matrix contains one selected from the group consisting of Mo-Si-O, W-Si-O and Mo-W-Si-O, the content of the Mo or W being at least 0.5 times the content of the Si.
申请公布号 US2014048783(A1) 申请公布日期 2014.02.20
申请号 US201313962114 申请日期 2013.08.08
申请人 SAMSUNG CORNING PRECISION MATERIALS CO., LTD. 发明人 HAN JIN WOO;KIM EUI SOO;PARK SEUNG WON;KIM JOOSOK;SOHN INSUNG
分类号 C23C14/34;H01L51/52 主分类号 C23C14/34
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