发明名称 |
SPUTTERING TARGET AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE INCLUDING BLACK MATRIX DEPOSITED THEREBY |
摘要 |
A sputtering target that can form a black matrix having high-resistance and low-reflection characteristics and an organic light-emitting display device including the black matrix deposited thereby. The sputtering target that is used in a sputtering process for depositing a black matrix contains one selected from the group consisting of Mo-Si-O, W-Si-O and Mo-W-Si-O, the content of the Mo or W being at least 0.5 times the content of the Si. |
申请公布号 |
US2014048783(A1) |
申请公布日期 |
2014.02.20 |
申请号 |
US201313962114 |
申请日期 |
2013.08.08 |
申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO., LTD. |
发明人 |
HAN JIN WOO;KIM EUI SOO;PARK SEUNG WON;KIM JOOSOK;SOHN INSUNG |
分类号 |
C23C14/34;H01L51/52 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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