METHOD OF PREVENTING OXIDATION AND METHOD OF PRODUCING A SEMICONDUCTOR PRODUCT

摘要

A method for preventing oxidation of a copper or copper alloy surface to be used as an electronic material, the method having the steps of: providing a metal corrosion inhibitor comprising a nitrogen-containing heteroaromatic compound and an organic amine compound, the organic amine compound having a hydrocarbon portion and an amine portion, with the proviso that the organic amine compound is not an alkanolamine; and applying the metal corrosion inhibitor to the surface of copper or copper alloy.